Sub-Terahertz Filter Demonstrator Using Porous Silicon Waveguides : Design, Manufacturing and Performance Evaluation

Details

Supervisors

Lederer, Dimitri ; Raskin, Jean-Pierre

Faculty

Ecole polytechnique de Louvain

Degree label

Master [120] : ingénieur civil électricien, à finalité spécialisée

Abstract

enThis master’s thesis investigates the feasibility of microwave circuits based on porous silicon waveguide technology. The study details the development of a fabrication process for porous silicon waveguides and filters, culminating in the measurement of a third-order filter. The fabricated filter exhibits an insertion loss of 10 dB, a return loss of 10 dB, and a bandwidth of 9% (including junction effects). Current simulations with current fabrication parameter predicted an insertion loss of 6 dB, a return loss of –25 dB, and a bandwidth of 12.5% after de-embedding. The results demonstrate proof-of-concept functionality, while also identifying significant opportunities for improvement. These findings lay the groundwork for future advancements in porous silicon-based microwave components.